机械

SECS/GEM通讯是应用于半导体制造设备和半导体工厂MES之间的通讯标准，半导体设备接入工厂的半导体MES，需要半导体设备按照SECS/GEM相关标准协议的要求实现通讯。为此，基于对SECS/GEM标准协议的研究分析，应用面向对象的设计方法，自上而下地进行软件设计和开发，提出一种整合了半导体设备通讯标准SECS/GEM的SDK，供设备端应用程序进行二次开发，为设备增添该通讯能力。SDK对SECS/GEM诸协议标准进行分层和实现、以动态链接库的形式进行封装、提供高级接口，并设计配置文件，将设备的本身特性进行分离，可以在不同类型的设备上进行部署。通过测试，验证了SDK可以满足SECS/GEM通讯要求，实现了标准中所述的各项能力，其可以应用于各类半导体制造设备的SECS/GEM通讯开发，实现与半导体工厂的MES互联。

SECS/GEM protocol is a communication standard applied between semiconductor manufacturing equipment and Manufacturing Execution System(MES) in semiconductor factory. The semiconductor equipment gets access to MES via communication in accordance with the requirements of SECS/GEM protocol. This paper applies object-oriented design method to design and develop software from top to bottom and puts forward an SDK integrating SECS/GEM standard for semiconductor equipment communication, which can be used for secondary development of equipment side applications to add the communication capability to the equipment.The SDK layers and implements SECS/GEM standards, encapsulates them in the form of dynamic link libraries,and provides advanced interfaces. Configuration files are designed to separate the inherent characteristics of the equipment and deploy them on different types of equipment. After testing, it is verified that the SDK can meet the requirements of SECS/GEM communication and realize the capabilities described in the standard. It can be applied to the SECS/GEM communication development of various semiconductor manufacturing equipment to realize the interconnection with the MES of semiconductor factories.